3d Simulator of Track Systems in Semiconductor Fabrication
نویسندگان
چکیده
This paper presents a 3D simulation environment for track systems in semiconductor fabrication. The track systems together with exposure tools carry out important functions of the photolithography process of semiconductor fabrication. The developed 3D track simulator can be used for design and evaluation of track systems, and their performance analysis. The main goal of the 3D track simulator is to provide a user with more accurate simulation environment for track systems. The developed 3D simulator consists of GUI (Graphic User Interface), scheduler, animator, and performance analyzer, where the animator part is constructed based on a discrete event simulation software, AutoMod, of Autosimulations. Copyright © 2002 IFAC
منابع مشابه
Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing
Semiconductor manufacturing involves lengthy and complex processes, and hence is capital intensive. Companies compete with each other by continuously employing new technologies, increasing yield, and reducing costs. Yield improvement is increasingly important as advanced fabrication technologies are complicated and interrelated. In particular, wafer bin maps (WBM) that present specific failure ...
متن کاملIdentification of Potential Deadlock Set in Semiconductor Track Systems
This paper addresses an efficient method to identify the process modules that can potentially cause deadlock in semiconductor track systems. Track systems carry out important functions in the photolithography process of semiconductor fabrication. Trends toward high automation and flexibility in the track systems accelerate the necessity of the intelligent controller that can guarantee deadlock-...
متن کاملFabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography
Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role nowadays in the fabrication of microand nano-structures especially for the realization of micro-electro-mechanical systems (MEMS), microfluidic devices, photonic crystals, photonic integrated circuits, micro-optics, and plasmonic optoelectronic devices. These devices have various practical appl...
متن کاملDiscrete-event Simulation Using Systemc: Interactive Semiconductor Factory Modeling with Fabsim
Semiconductor fabrication factories are large enterprises with many toolsets, each having multiple production machines. The process flow is highly reentrant, therefore modeling is best done by discrete-event simulation. To describe such a fab, the author has developed a new discrete event simulator called FabSim. It is written in C++. As the simulation engine it uses SystemC, a C++ class librar...
متن کاملFABMAS: An Agent-Based System for Production Control of Semiconductor Manufacturing Processes
In this paper, we present results on designing the architecture of an agent-based system for production control of semiconductor wafer fabrication facilities (wafer fabs). These manufacturing systems are characterized by reentrant product flows, sequence dependant setup-times, inhomogenous parallel machines, a diverse product mix, a mix of different process types, prescribed due dates of the or...
متن کامل